Electromigration and drop test of Pb-free solder joints in mobile electronic devices
PI Name: King-Ning Tu
E-mail: kntu@seas.ucla.edu
Campus: UCLA
Award Total: $269,235
Project Period: 9/1/2006 - 8/31/2008

Engineering MOS Interfaces with Hf based Dielectrics and Metals
PI Name: Jane Chang
E-mail: jpchang@seas.ucla.edu
Campus: UCLA
Award Total: $165,961
Project Period: 9/1/2006 - 8/31/2008

An On-Chip Protein Array with Multiplexed Electrical Detection.
PI Name: Abraham Lee
E-mail: aplee@uci.edu
Campus: UCI
Award Total: $87,104
Project Period: 4/25/2006 - 4/24/2008

High Performance Ambipolar Vertical Organic Transistors
PI Name: Yang Yang
E-mail: yangy@ucla.edu
Campus: UCLA
Award Total: $207,200
Project Period: 4/25/2006 - 4/24/2007

Fabrication of Advanced Nanoprobes for Nanotech Applications
PI Name: Sungho Jin
E-mail: jin@ucsd.edu
Campus: UCSD
Award Total: $1,242,756
Project Period: 4/25/2006 - 4/24/2009

New Ferroelectric Actuators: Simulations, Design, Reliability and Manufacturing
PI Name: Robert McMeeking
E-mail: rmcm@engineering.ucsb.edu
Campus: UCSB
Award Total: $117,619
Project Period: 4/25/2006 - 4/24/2008

Zero-power transducers for remote sensing applications
PI Name: G. P. Li
E-mail: gpli@uci.edu; cmchrist@uci.edu
Campus: UCI
Award Total: $174,227
Project Period: 1/31/2006 - 1/30/2007

Interaction of Xenon Fluoride and Other Fluorine-containing Molecules with Semiconductor and Metal Surfaces
PI Name: Gabor Somorjai
E-mail: somorjai@socrates.berkeley.edu
Campus: UCB
Award Total: $189,987
Project Period: 1/31/2006 - 1/30/2008

Feature Level Compensation and Control (Year Three)
PI Name: Andrew Neureuther
E-mail: neureuth@eecs.berkeley.edu
Campus: UCB, UCSD, UCLA
Award Total: $1,958,735
Project Period: 1/31/2006 - 1/30/2007

Spin Gain Transistor in Ferromagnetic Semiconductors
PI Name: Kang Wang
E-mail: wang@ee.ucla.edu
Campus: UCLA
Award Total: $1,094,168
Project Period: 1/31/2006 - 1/30/2010

Investigation and Development of Processes and Components Applicable to Ultra-High Specific Power Density Solar Blankets
PI Name: Mark Goorsky
E-mail: goorsky@seas.ucla.edu
Campus: UCLA
Award Total: $159,540
Project Period: 1/31/2006 - 1/30/2010

Preparation of III-V surfaces for gate dielectric deposition and creation of high-performance III-V based QWFETs
PI Name: Andrew Kummel
E-mail: akummel@ucsd.edu
Campus: UCSD
Award Total: $340,109
Project Period: 1/31/2006 - 1/30/2008

Western Institute of Nanoelectronics
PI Name: Kang Wang
E-mail: wang@ee.ucla.edu
Campus: UCLA, UCB, UCSB
Award Total: $10,867,154
Project Period: 1/31/2006 - 1/30/2010

Development of Large-Area GaN-based LEDs (continuation of previous project)
PI Name: Henry Lee
E-mail: hplee@uci.edu; vtencer@uci.edu
Campus: UCI
Award Total: $41,179
Project Period: 1/31/2006 - 1/30/2007

Local Probe Characterization and Manipulation of Diamondoid Molecules
PI Name: Michael Crommie
E-mail: crommie@berkeley.edu
Campus: UCB
Award Total: $49,901
Project Period: 1/31/2006 - 1/30/2007

Ammonia (NH3) and Nitrogen Dioxide (NO2) Nano Gas Sensors
PI Name: Nosang Myung
E-mail: myung@engr.ucr.edu
Campus: UCR
Award Total: $213,778
Project Period: 1/31/2006 - 1/30/2008

Advanced Technology for V-Band AlGaN/GaN Power Amplifiers
PI Name: Umesh Mishra
E-mail: mishra@ece.ucsb.edu
Campus: UCSB
Award Total: $84,014
Project Period: 1/31/2006 - 1/30/2007

Flip-Chip Packaging for Advanced Low-k/Cu ICs: Materials, Processing and Reliability Issues
PI Name: Frank Shi
E-mail: fgshi@uci.edu
Campus: UCI
Award Total: $78,925
Project Period: 8/23/2005 - 8/22/2007

High-resolution color displays based on electroluminescent polymer technology
PI Name: Qibing Pei
E-mail: qpei@seas.ucla.edu
Campus: UCLA
Award Total: $690,279
Project Period: 8/23/2005 - 8/22/2009

Carbon Nanotube Based Interface Material for Microelectronic Heatsinks
PI Name: Brett Cruden
E-mail: bcruden@arc.nasa.gov
Campus: UCSC
Award Total: $317,492
Project Period: 8/23/2005 - 12/22/2006

Development Program for 6H-SiC Pressure Sensors
PI Name: Andrei Shkel
E-mail: ashkel@uci.edu
Campus: UCI
Award Total: $370,176
Project Period: 8/23/2005 - 8/22/2008

Light from Novel Materials: Organic LEDs and Inorganic Phosphors
PI Name: Glenn Fredrickson
E-mail: ghf@mrl.ucsb.edu
Campus: UCSB
Award Total: $1,772,746
Project Period: 8/23/2005 - 8/22/2007

Research on wireless sensor network technology
PI Name: G. P. Li
E-mail: gpli@uci.edu; cmchrist@uci.edu
Campus: UCI
Award Total: $239,686
Project Period: 8/23/2005 - 8/22/2006

Exploring the Limits of Thermal Transport Using Nanostructured Diamondoids
PI Name: Arun Majumdar
E-mail: majumdar@me.berkeley.edu
Campus: UCB
Award Total: $66,084
Project Period: 8/23/2005 - 8/22/2006

Development of Broad-band Push-Pull Power Amplifier Modules
PI Name: Anh-Vu Pham
E-mail: pham@ece.ucdavis.edu
Campus: UCD
Award Total: $73,957
Project Period: 5/10/2005 - 5/9/2006

Efficient packaging methods of high brightness GaN-based light emitting diodes
PI Name: Chin Lee
E-mail: cclee@uci.edu
Campus: UCI
Award Total: $97,828
Project Period: 5/10/2005 - 8/9/2006

MEMS RF-Interrogated Biosensor
PI Name: Albert Pisano
E-mail: appisano@me.berkeley.edu
Campus: UCB
Award Total: $246,424
Project Period: 5/10/2005 - 5/9/2007

Investigation of millimeter wave electronic scanned array radar
PI Name: Tatsuo Itoh
E-mail: itoh@ee.ucla.edu
Campus: UCLA
Award Total: $147,926
Project Period: 5/10/2005 - 5/9/2006

An On-Chip Protein Array with Multiplexed Electrical Detection
PI Name: Abraham Lee
E-mail: aplee@uci.edu
Campus: UCI
Award Total: $43,989
Project Period: 5/3/2005 - 5/2/2006

Optimization of Self Reverse Biasing for Leakage Reduction in Mobile VLSI Circuits and Systems
PI Name: Sung Mo Kang
E-mail: kang@soe.ucsc.edu
Campus: UCSC
Award Total: $167,360
Project Period: 1/25/2005 - 1/24/2007

MEMS-Enabled Ventricular Catheter for Hydrocephalus
PI Name: Jack Judy
E-mail: jjudy@ee.ucla.edu
Campus: UCLA
Award Total: $337,495
Project Period: 1/25/2005 - 1/24/2008

Vertical Organic Transistors - a novel concept for a high performance organic transistor
PI Name: Yang Yang
E-mail: yangy@ucla.edu
Campus: UCLA
Award Total: $177,654
Project Period: 1/25/2005 - 1/24/2006

Feature Level Compensation and Control (Year Two)
PI Name: Andrew Neureuther
E-mail: neureuth@eecs.berkeley.edu
Campus: UCB, UCSD, UCLA
Award Total: $1,770,193
Project Period: 1/25/2005 - 1/24/2006

Diamondoid Based New Optoelectronic Materials
PI Name: Frank Shi
E-mail: fgshi@uci.edu
Campus: UCI
Award Total: $164,551
Project Period: 1/25/2005 - 1/24/2007

Nanoscale Configurable Electronic Devices and Circuits from Organic Materials
PI Name: Yong Chen
E-mail: yongchen@seas.ucla.edu
Campus: UCLA
Award Total: $679,144
Project Period: 1/25/2005 - 1/24/2007

Interaction of Molecular Diamond with Si Surfaces
PI Name: Roya Maboudian
E-mail: maboudia@socrates.berkeley.edu
Campus: UCB
Award Total: $68,846
Project Period: 1/25/2005 - 1/24/2006

Automotive Grade Rate Gyroscopes
PI Name: Andrei Shkel
E-mail: ashkel@uci.edu
Campus: UCI
Award Total: $921,710
Project Period: 1/25/2005 - 1/24/2008

Control and Modeling in Photolithography for Yield and Throughput Enhancement
PI Name: Masayoshi Tomizuka
E-mail: tomizuka@me.berkeley.edu
Campus: UCB
Award Total: $188,371
Project Period: 1/25/2005 - 1/24/2007

High Efficiency Power Amplifier Design for Non-Constant-Envelope Modulation
PI Name: Yuanxun Wang
E-mail: ywang@ee.ucla.edu
Campus: UCLA
Award Total: $89,130
Project Period: 8/31/2004 - 8/30/2005

Reliability Assessment of Ball Grid Array (BGA) Solder Joints
PI Name: King-Ning Tu
E-mail: kntu@seas.ucla.edu
Campus: UCLA
Award Total: $90,928
Project Period: 8/24/2004 - 8/23/2005

Ferromagnetic YIG Thin Film-Based Tunable Wideband Microwave Filters
PI Name: Chen Tsai
E-mail: cstsai@uci.edu
Campus: UCI
Award Total: $20,200
Project Period: 8/24/2004 - 7/12/2005

METAMATERIAL BASED SMALL ANTENNAS
PI Name: Tatsuo Itoh
E-mail: itoh@ee.ucla.edu
Campus: UCLA
Award Total: $69,296
Project Period: 8/24/2004 - 8/23/2005

High Performance Nanostructured Cathode for Lithium-ion Battery
PI Name: Ning Pan
E-mail: npan@ucdavis.edu
Campus: UCD
Award Total: $76,108
Project Period: 8/24/2004 - 8/23/2005

Wide-band gap materials for harsh sensor applications
PI Name: Andrei Shkel
E-mail: ashkel@uci.edu
Campus: UCI
Award Total: $64,021
Project Period: 8/24/2004 - 8/23/2005

Growth of High Quality InGaAsN Solar Cells
PI Name: Robert Hicks
E-mail: rhicks@ucla.edu
Campus: UCLA
Award Total: $38,654
Project Period: 8/24/2004 - 8/23/2005

Development of Bulk Micromachined High-g Piezoresistive(PR) Accelerometer
PI Name: Andrei Shkel
E-mail: ashkel@uci.edu
Campus: UCI
Award Total: $72,073
Project Period: 8/24/2004 - 8/23/2005

Engineering dielectric thin films on semiconductor surfaces
PI Name: Jane Chang
E-mail: jpchang@seas.ucla.edu
Campus: UCLA
Award Total: $244,144
Project Period: 5/11/2004 - 5/10/2006

Nanostructured Electrodes for Micro Fuel Cells
PI Name: Yushan Yan
E-mail: Yushan.Yan@ucr.edu
Campus: UCR
Award Total: $361,855
Project Period: 5/11/2004 - 5/10/2007

High-Density Electrodes for Retinal Prostheses
PI Name: Jack Judy
E-mail: jjudy@ee.ucla.edu
Campus: UCLA
Award Total: $63,059
Project Period: 5/4/2004 - 5/5/2004

Feature Level Compensation and Control (Year One)
PI Name: Andrew Neureuther
E-mail: neureuth@eecs.berkeley.edu
Campus: UCB, UCSD, UCSB
Award Total: $2,286,430
Project Period: 1/27/2004 - 1/26/2005

Emission enhancement and debris mitigation of laser-plasma x-ray light sources for EUV lithography
PI Name: Mark Tillack
E-mail: mtillack@ucsd.edu
Campus: UCSD
Award Total: $438,115
Project Period: 1/27/2004 - 1/26/2006

Development of Large-Area GaN-based LEDs
PI Name: Henry Lee
E-mail: hplee@uci.edu; vtencer@uci.edu
Campus: UCI
Award Total: $69,922
Project Period: 1/27/2004 - 1/26/2006

Hybrid Long-Wavelength Vertical-Cavity Lasers
PI Name: John Bowers
E-mail: bowers@ece.ucsb.edu
Campus: UCSB
Award Total: $204,528
Project Period: 1/27/2004 - 1/26/2005

Plasma Etching of High Aspect Ratio Features in Si
PI Name: Eray Aydil
E-mail: aydil@engineering.ucsb.edu
Campus: UCSB
Award Total: $202,952
Project Period: 1/27/2004 - 1/26/2007

Investigation of the Inital Phase of the Deposition of Ga2O3 and Related Materials On GaAs
PI Name: Andrew Kummel
E-mail: akummel@ucsd.edu
Campus: UCSD
Award Total: $130,221
Project Period: 1/27/2004 - 1/26/2006

Templates for GaN-based Electronic Devices
PI Name: Mark Goorsky
E-mail: goorsky@seas.ucla.edu
Campus: UCLA
Award Total: $50,081
Project Period: 1/27/2004 - 1/26/2005

Wide Bandwidth Baluns for Advanced Amplifier Concepts
PI Name: Anh-Vu Pham
E-mail: pham@ece.ucdavis.edu
Campus: UCD
Award Total: $128,362
Project Period: 1/27/2004 - 1/26/2005

Agile Beam Steering Using MEMS Micromirror Arrays
PI Name: Ming Wu
E-mail: wu@ee.ucla.edu
Campus: UCLA
Award Total: $244,725
Project Period: 9/3/2003 - 9/2/2005

Electrochromic Films for Tunable Filters
PI Name: Bruce Dunn
E-mail: bdunn@ucla.edu
Campus: UCLA
Award Total: $229,785
Project Period: 9/3/2003 - 9/2/2005

High-Rate, High-Capacity, Nanostructured Li-Ion Battery Anode
PI Name: Ning Pan
E-mail: npan@ucdavis.edu
Campus: UCD
Award Total: $75,189
Project Period: 9/3/2003 - 9/2/2004

Research on Bio-micro-instrumentation Platform Technology
PI Name: G. P. Li
E-mail: gpli@uci.edu; cmchrist@uci.edu
Campus: UCI
Award Total: $627,352
Project Period: 9/3/2003 - 9/2/2005

New Methods for 3D Lithography of Micro/Nanoelectronics
PI Name: Marc Madou
E-mail: mmadou@uci.edu
Campus: UCI
Award Total: $71,289
Project Period: 9/3/2003 - 9/2/2004

New Ferroelectric Actuators: Simulations, Design, Reliability and Manufacturing
PI Name: Robert McMeeking
E-mail: rmcm@engineering.ucsb.edu
Campus: UCSB
Award Total: $173,971
Project Period: 9/3/2003 - 9/2/2005

Development of spin-on zeolite low-k dielectric films
PI Name: Yushan Yan
E-mail: Yushan.Yan@ucr.edu
Campus: UCR
Award Total: $201,713
Project Period: 9/3/2003 - 9/2/2006

Growth and Control of Carbon Nanotubes for Improved Electron Field Emission
PI Name: Sungho Jin
E-mail: jin@ucsd.edu
Campus: UCSD
Award Total: $1,442,961
Project Period: 5/13/2003 - 8/12/2006

Resonant voltage regulator for next generation microprocessors
PI Name: Keyue Smedley
E-mail: smedley@uci.edu
Campus: UCI
Award Total: $91,354
Project Period: 5/13/2003 - 12/31/2004

Fundamental Investigation of Stiction in MEMS: Effect of Electrostatic Forces
PI Name: Roya Maboudian
E-mail: maboudia@socrates.berkeley.edu
Campus: UCB
Award Total: $172,962
Project Period: 5/13/2003 - 5/12/2005

Liquid Fueled, MEMS Enabled, Miniature Internal Combustion Engine
PI Name: Albert Pisano
E-mail: appisano@me.berkeley.edu
Campus: UCB
Award Total: $347,687
Project Period: 1/22/2003 - 1/21/2005

Plasma assisted deposition of dielectric thin films for high speed microelectronics
PI Name: Jane Chang
E-mail: jpchang@seas.ucla.edu
Campus: UCLA
Award Total: $184,342
Project Period: 1/22/2003 - 1/21/2005

Low-Cost Silicon Nitride Deposition Process
PI Name: Robert Hicks
E-mail: rhicks@ucla.edu
Campus: UCLA
Award Total: $46,766
Project Period: 1/22/2003 - 1/21/2004

Compound Semiconductor Research for Telecommunications
PI Name: G. P. Li
E-mail: gpli@uci.edu; cmchrist@uci.edu
Campus: UCI
Award Total: $166,294
Project Period: 1/22/2003 - 1/21/2006

Plasma wave electronics
PI Name: Peter Burke
E-mail: pburke@uci.edu
Campus: UCI
Award Total: $55,391
Project Period: 12/1/2002 - 1/21/2004

Compact AlGaN-Based Emitters for Remote Bio-Agent Sensing
PI Name: James Speck
E-mail: speck@mrl.ucsb.edu
Campus: UCSB
Award Total: $806,377
Project Period: 12/1/2002 - 1/21/2004

Wafer-scale Laser Lift-off of Gallium Nitride LEDs
PI Name: Timothy Sands
E-mail: sands@uclink.berkeley.edu
Campus: UCB
Award Total: $105,082
Project Period: 8/27/2002 - 8/26/2003

Heterogeneous Integration of MEMS and Electro-Optic Polymers
PI Name: George Johnson
E-mail: gjohnson@me.berkeley.edu
Campus: UCB
Award Total: $124,476
Project Period: 8/27/2002 - 8/26/2004

Integration Issues for Nanotube-Based Electronics and Sensors
PI Name: Philip Collins
E-mail: pg_collins@excite.com
Campus: UCI
Award Total: $151,693
Project Period: 8/27/2002 - 8/26/2004

Multi-beam Adaptive Beamforming Antenna for High Speed Applications
PI Name: Tatsuo Itoh
E-mail: itoh@ee.ucla.edu
Campus: UCLA
Award Total: $68,104
Project Period: 8/27/2002 - 8/26/2003

Characterization of III-V photonic / electronic heterostructures
PI Name: Mark Goorsky
E-mail: goorsky@seas.ucla.edu
Campus: UCLA
Award Total: $40,352
Project Period: 8/27/2002 - 8/26/2003

Advanced Modeling and Control for PhotoLithography
PI Name: Masayoshi Tomizuka
E-mail: tomizuka@me.berkeley.edu
Campus: UCB
Award Total: $169,312
Project Period: 8/27/2002 - 2/26/2005

Wafer-Bonded Optoelectronic Devices for Telecom Applications
PI Name: John Bowers
E-mail: bowers@ece.ucsb.edu
Campus: UCSB
Award Total: $1,051,931
Project Period: 8/27/2002 - 8/26/2003

Integration Technology for Metal and Magnetic MEMS Fabrication
PI Name: Mark Bachman
E-mail: mbachman@uci.edu
Campus: UCI
Award Total: $88,507
Project Period: 8/27/2002 - 8/26/2003

III-V Template Structures for High Speed Electronics
PI Name: Mark Goorsky
E-mail: goorsky@seas.ucla.edu
Campus: UCLA
Award Total: $148,499
Project Period: 8/27/2002 - 8/26/2003

Resonant voltage regulator for next generation microprocessors
PI Name: Keyue Smedley
E-mail: smedley@uci.edu
Campus: UCI
Award Total: $89,457
Project Period: 8/27/2002 - 12/31/2003

Fabrication of Novel Metal Matrix Composites (MMCs) for Microelectronic Packaging
PI Name: Enrique Lavernia
E-mail: lavernia@ucdavis.edu
Campus: UCI
Award Total: $270,964
Project Period: 8/27/2002 - 12/31/2005

Organic Materials of Intermediate Molecular Dimensions for Light Emitting Diodes
PI Name: Guillermo Bazan
E-mail: bazan@chem.ucsb.edu
Campus: UCSB
Award Total: $167,797
Project Period: 8/27/2002 - 12/31/2003

RF Characterization and Applications of BST Tunable Devices
PI Name: Robert York
E-mail: rayork@ece.ucsb.edu
Campus: UCSB
Award Total: $17,222
Project Period: 8/27/2002 - 5/26/2004

Optically transparent electrically conductive thin films
PI Name: Othon Monteiro
E-mail: ORMonteiro@lbl.gov
Campus: LBNL
Award Total: $274,220
Project Period: 8/27/2002 - 8/26/2004

Nanostructured Electrodes for Micro Fuel Cells
PI Name: Yushan Yan
E-mail: Yushan.Yan@ucr.edu
Campus: UCR
Award Total: $243,218
Project Period: 8/27/2002 - 2/28/2004

Development of Electro-chemical Etching on Si Substrates
PI Name: Henry Lee
E-mail: hplee@uci.edu; vtencer@uci.edu
Campus: UCI
Award Total: $50,194
Project Period: 4/26/2002 - 4/25/2003

Development of Large-Area GaN-based LEDs
PI Name: Henry Lee
E-mail: hplee@uci.edu; vtencer@uci.edu
Campus: UCI
Award Total: $28,294
Project Period: 4/26/2002 - 4/25/2003

MOCVD Research for Monolithic Integration of 40 Gb/s Transceivers
PI Name: Robert Hicks
E-mail: rhicks@ucla.edu
Campus: UCLA
Award Total: $463,479
Project Period: 1/25/2002 - 1/25/2005

Optimization of Poly-SiGe Surface-Micromachining Technology for Integrated MEMS
PI Name: Tsu-Jae King
E-mail: tking@eecs.berkeley.edu
Campus: UCB
Award Total: $100,650
Project Period: 1/25/2002 - 1/24/2003

Reproducible Etching of Deep Trenches and Very High Aspect Ratio Features on Si
PI Name: Eray Aydil
E-mail: aydil@engineering.ucsb.edu
Campus: UCSB
Award Total: $202,656
Project Period: 1/25/2002 - 1/24/2005

Thermal characterization of multi section semiconductor laser devices and packages
PI Name: Ali Shakouri
E-mail: ali@cse.ucsc.edu
Campus: UCSC
Award Total: $79,375
Project Period: 1/25/2002 - 1/24/2003

Experimental and theoretical analysis on the interface of high-k dielectrics and silicon
PI Name: Jane Chang
E-mail: jpchang@seas.ucla.edu
Campus: UCLA
Award Total: $97,287
Project Period: 1/25/2002 - 1/24/2004

Kinetic study of atomic layer controlled deposition of high dielectric constant materials
PI Name: Jane Chang
E-mail: jpchang@seas.ucla.edu
Campus: UCLA
Award Total: $94,331
Project Period: 1/25/2002 - 1/24/2004

Investigation of Fiber-based Tunable Devices for Dynamic Gain Flattening in Dense Wavelength Division Multiplexing (DWDM) System
PI Name: Henry Lee
E-mail: hplee@uci.edu; vtencer@uci.edu
Campus: UCI
Award Total: $22,960
Project Period: 8/24/2001 - 8/23/2002

High-Speed, Manufacturable HBTs
PI Name: Umesh Mishra
E-mail: mishra@ece.ucsb.edu
Campus: UCSB
Award Total: $672,777
Project Period: 8/24/2001 - 8/30/2002

Processing-induced Defects in Large Diameter Silicon Substrates
PI Name: Mark Goorsky
E-mail: goorsky@seas.ucla.edu
Campus: UCLA
Award Total: $85,598
Project Period: 8/24/2001 - 8/23/2002

Zeolite low-k dielectrics
PI Name: Yushan Yan
E-mail: Yushan.Yan@ucr.edu
Campus: UCR
Award Total: $41,949
Project Period: 8/24/2001 - 2/23/2003

Design and Manufacturing of Materials and Devices for Optical and Electronic Applications
PI Name: Glenn Fredrickson
E-mail: ghf@mrl.ucsb.edu
Campus: UCSB
Award Total: $3,783,095
Project Period: 8/24/2001 - 8/23/2005

Integrated Information and Communication System Technologies
PI Name: G. P. Li
E-mail: gpli@uci.edu; cmchrist@uci.edu
Campus: UCI
Award Total: $4,710,608
Project Period: 8/24/2001 - 8/23/2003

Thermochemistry of Gate Dielectric Films
PI Name: Alexandra Navrotsky
E-mail: anavrotsky@ucdavis.edu
Campus: UCD
Award Total: $283,739
Project Period: 8/24/2001 - 8/23/2004

Optical Fiber Packaging by soldered V-grooves
PI Name: King-Ning Tu
E-mail: kntu@seas.ucla.edu
Campus: UCLA
Award Total: $94,888
Project Period: 5/1/2001 - 7/31/2003

Processing of High Definition Display Screens
PI Name: Jan Talbot
E-mail: Jtalbot@ucsd.edu
Campus: UCSD
Award Total: $53,796
Project Period: 5/1/2001 - 10/31/2002

Process Research for Advanced CMOS
PI Name: Robert Hicks
E-mail: rhicks@ucla.edu
Campus: UCLA
Award Total: $46,525
Project Period: 5/1/2001 - 4/30/2002

Tapered Transitions between Substrate-Removed Compound Semiconductor Waveguides and Polymer Waveguides for Low Cost Fiber-Optic Packaging
PI Name: Nadir Dagli
E-mail: dagli@ece.ucsb.edu
Campus: UCSB
Award Total: $64,161
Project Period: 1/26/2001 - 7/25/2002

Organic thin film transistors fabricated using spray-deposition
PI Name: Vivek Subramanian
E-mail: viveks@eecs.berkeley.edu
Campus: UCB
Award Total: $218,589
Project Period: 1/26/2001 - 1/24/2004

Integrated Microfluidic Chip Technologies
PI Name: Mark Bachman
E-mail: mbachman@uci.edu
Campus: UCI
Award Total: $29,348
Project Period: 1/26/2001 - 1/25/2002

MEMS Non-Dispersive Spectrometer
PI Name: John La Rue
E-mail: jclarue@uci.edu
Campus: UCI
Award Total: $194,843
Project Period: 1/26/2001 - 10/18/2002

Study of neutral reactant and etch by-product transport mechanisms for sub-100nm plasma processing
PI Name: George Tynan
E-mail: gtynan@ucsd.edu
Campus: UCSD
Award Total: $381,926
Project Period: 1/26/2001 - 1/25/2003

Novel Coating Strategies for High Reliability MEMS
PI Name: Roya Maboudian
E-mail: maboudia@socrates.berkeley.edu
Campus: UCB
Award Total: $169,631
Project Period: 1/26/2001 - 1/24/2004

In-situ Gas Phase Cleaning of Silicon Wafers Prior to Gate Dielectric Deposition
PI Name: Jane Chang
E-mail: jpchang@seas.ucla.edu
Campus: UCLA
Award Total: $51,094
Project Period: 1/26/2001 - 1/25/2003

Small Feature Reproductivity
PI Name: Costas Spanos
E-mail: Spanos@eecs.Berkeley.edu
Campus: UCB, UCSD, UCSB, UCLA, UCD
Award Total: $5,387,367
Project Period: 9/1/2000 - 8/31/2003

Fundamental Studies of the Interactions of Etch Products with Si Surfaces During Plasma Etching of Si
PI Name: Eray Aydil
E-mail: aydil@engineering.ucsb.edu
Campus: UCSB
Award Total: $103,393
Project Period: 9/1/2000 - 8/31/2002

GaN based heterojunction microwave power devices/amplifiers
PI Name: Kang Wang
E-mail: wang@ee.ucla.edu
Campus: UCLA
Award Total: $40,226
Project Period: 9/1/2000 - 8/31/2001

The Cathodoluminescence Emission Intensity of Silver Activaged Zinc Sulfide Phosphors: Experiments and Modeling
PI Name: Joanna McKittrick
E-mail: jmckittrick@ucsd.edu
Campus: UCSD
Award Total: $16,522
Project Period: 9/1/2000 - 8/31/2001

Environmental Value Analysis of Semiconductor Manufacturing Systems
PI Name: David Dornfeld
E-mail: dornfeld@me.Berkeley.edu
Campus: UCB
Award Total: $90,810
Project Period: 9/1/2000 - 8/31/2002

Improving forecasts in the high tech industry
PI Name: Dorit Hochbaum
E-mail: hochbaum@ieor.berkeley.edu
Campus: UCB
Award Total: $40,616
Project Period: 9/1/2000 - 8/31/2002

Electron and Dissociation Kinetics in Plasma Etch Reactors
PI Name: George Tynan
E-mail: gtynan@ucsd.edu
Campus: UCSD
Award Total: $269,120
Project Period: 9/1/2000 - 8/31/2002

Synthesis and Characterization of Hybrid Low-k (k
PI Name: King-Ning Tu
E-mail: kntu@seas.ucla.edu
Campus: UCLA
Award Total: $33,664
Project Period: 7/1/2000 - 6/30/2001

Design, Fabrication, Modeling, Manufacturing of MEMS in Magnetic Hard Disk Drives
PI Name: G. P. Li
E-mail: gpli@uci.edu; cmchrist@uci.edu
Campus: UCI
Award Total: $681,041
Project Period: 7/1/2000 - 6/30/2002

Reliability of MEMS Structures for Space Environments
PI Name: Hari Dharan
E-mail: dharan@me.berkeley.edu
Campus: UCB
Award Total: $69,930
Project Period: 7/1/2000 - 6/30/2002

Rapid Thermal CVD of High-K Dielectric Materials
PI Name: Jane Chang
E-mail: jpchang@seas.ucla.edu
Campus: UCLA
Award Total: $101,955
Project Period: 2/1/2000 - 1/31/2002

Poly-SiGe Surface-Micromachining for Modular Post-CMOS Integrated MEMS
PI Name: Tsu-Jae King
E-mail: tking@eecs.berkeley.edu
Campus: UCB
Award Total: $165,641
Project Period: 2/1/2000 - 1/31/2003

MEMOS Manufacturing Research for Integrated System Technologi es
PI Name: G. P. Li
E-mail: gpli@uci.edu; cmchrist@uci.edu
Campus: UCI, UCSD, UCLA, UCSC
Award Total: $3,570,237
Project Period: 7/1/1999 - 6/30/2001

Gate-All-Around Quantum-Wire MOSFET
PI Name: Jean-Pierre Colinge
E-mail: colinge@ece.ucdavis.edu
Campus: UCD
Award Total: $139,942
Project Period: 7/1/1999 - 6/30/2001

Development of Ultrahigh Purity Gallium Nitride
PI Name: James Speck
E-mail: speck@mrl.ucsb.edu
Campus: UCSB
Award Total: $15,422
Project Period: 7/1/1999 - 6/30/2000

Zeolite thin films as low k inter-metal dielectrics
PI Name: Yushan Yan
E-mail: Yushan.Yan@ucr.edu
Campus: UCR
Award Total: $265,649
Project Period: 7/1/1999 - 6/30/2001

Modeling and Control for Quantum Well Devices
PI Name: Russel Caflisch
E-mail: caflisch@math.ucla.edu
Campus: UCLA
Award Total: $41,533
Project Period: 7/1/1999 - 6/30/2000

Controlled, Magnetized Plasma Processing, and its Application to Semiconductor Processing
PI Name: Alfred Wong
E-mail: awong@physics.ucla.edu
Campus: UCLA
Award Total: $1,483,003
Project Period: 7/1/1999 - 6/30/2001

Development of an Integrated Electronic Nose
PI Name: Jack Judy
E-mail: jjudy@ee.ucla.edu
Campus: UCLA
Award Total: $151,575
Project Period: 7/1/1999 - 6/30/2000

Design and Fabrication of Electrical Contacts for IC Probing at the Wafer Level
PI Name: Kyriakos Komvopoulos
E-mail: kyriakos@me.berkeley.edu
Campus: UCB
Award Total: $180,709
Project Period: 7/1/1999 - 6/30/2001

Plasma Diagnostics for Understanding Plasma-Wall Interactions and Process Stability
PI Name: Eray Aydil
E-mail: aydil@engineering.ucsb.edu
Campus: UCSB
Award Total: $232,897
Project Period: 7/1/1999 - 6/30/2001

Processing and Characterization of Hybrid Organic/Inorganic Films Having Low Dielectric Constant as Interlayer Isolator in ULSI
PI Name: King-Ning Tu
E-mail: kntu@seas.ucla.edu
Campus: UCLA
Award Total: $39,079
Project Period: 7/1/1999 - 6/30/2000

Chip Packaging Metallurgy Research
PI Name: King-Ning Tu
E-mail: kntu@seas.ucla.edu
Campus: UCLA
Award Total: $137,931
Project Period: 7/1/1999 - 6/30/2001

Fabrication of Flat High Definition Display Screens
PI Name: Jan Talbot
E-mail: Jtalbot@ucsd.edu
Campus: UCSD
Award Total: $48,128
Project Period: 7/1/1999 - 6/30/2000

Advanced Gate-Stack Materials for Future CMOS Devices
PI Name: Chenming Hu
E-mail: hu@eecs.berkeley.edu
Campus: UCB
Award Total: $292,374
Project Period: 6/30/1999 - 6/29/2000

Spectroscopic Characterization of Plasma-Based Reactor Chemistry Responsible for Environmentally Clean Semiconductor Manufacturing
PI Name: Peter Kelly
E-mail: kelly@indigo.ucdavis.edu
Campus: UCD
Award Total: $9,762
Project Period: 2/1/1999 - 1/31/2001

Development of Novel Optical Characterization Techniques for Semiconductor Manufacturing Enhancement
PI Name: G. P. Li
E-mail: gpli@uci.edu; cmchrist@uci.edu
Campus: UCI
Award Total: $181,860
Project Period: 2/1/1999 - 1/31/2000

Multidisciplinary Research and Training in Semiconductor Manufacturing
PI Name: Robert Hicks
E-mail: rhicks@ucla.edu
Campus: UCLA
Award Total: $393,376
Project Period: 2/1/1999 - 1/31/2001

Research on Properties of Integrated Circuits Fabricated on Thin Wafers
PI Name: Richard Nelson
E-mail: rnelson@uci.edu
Campus: UCI
Award Total: $42,154
Project Period: 9/1/1998 - 8/31/1999

Research on Environmentally Clean Manufacturing
PI Name: Alfred Wong
E-mail: awong@physics.ucla.edu
Campus: UCLA
Award Total: $428,330
Project Period: 7/1/1998 - 6/30/2000

Physics and Chemistry of Next Generation Plasma Processing Reactors
PI Name: George Tynan
E-mail: gtynan@ucsd.edu
Campus: UCSD
Award Total: $417,626
Project Period: 6/30/1998 - 6/29/2000

Research for Seals for Surface Machined Devices
PI Name: Richard Nelson
E-mail: rnelson@uci.edu
Campus: UCI
Award Total: $41,966
Project Period: 6/30/1998 - 6/29/2000

Development of an Intelligent Epitaxial System for the Manufacturing of Vertical Cavity Surface Emitting Lasers (VCSELS)
PI Name: Henry Lee
E-mail: hplee@uci.edu; vtencer@uci.edu
Campus: UCI
Award Total: $177,286
Project Period: 6/30/1998 - 11/24/1999

Research for MEMS Vacuum Seals
PI Name: Richard Nelson
E-mail: rnelson@uci.edu
Campus: UCI
Award Total: $41,966
Project Period: 6/30/1998 - 6/29/1999

Fabrication of High Definition CRT (HDTV) Screens
PI Name: Jan Talbot
E-mail: Jtalbot@ucsd.edu
Campus: UCSD
Award Total: $37,950
Project Period: 6/30/1998 - 6/29/1999

Processing and Characterization of Hybrid Organic/Inorganic Films Having Low Dielectric Constant as Interlayer Isolator in ULSI
PI Name: King-Ning Tu
E-mail: kntu@seas.ucla.edu
Campus: UCLA
Award Total: $42,000
Project Period: 6/30/1998 - 6/29/1999

Structure Properties and Processing of Aerogel as Interlayer Dialectic in ULSI
PI Name: King-Ning Tu
E-mail: kntu@seas.ucla.edu
Campus: UCLA
Award Total: $50,156
Project Period: 6/30/1998 - 6/29/2000

Plasma Cleaning of Semiconductor Materials
PI Name: Robert Hicks
E-mail: rhicks@ucla.edu
Campus: UCLA
Award Total: $78,636
Project Period: 6/30/1998 - 6/29/1999

Multidisciplinary Research and Training in Semiconductor Manufacturing
PI Name: Robert Hicks
E-mail: rhicks@ucla.edu
Campus: UCLA
Award Total: $355,652
Project Period: 6/30/1998 - 6/29/2000

Point-of-Use Plasma Treatment of Greenhouse Gas Emission
PI Name: David Graves
E-mail: graves@uclink4.Berkeley.edu
Campus: UCB
Award Total: $66,666
Project Period: 6/30/1998 - 6/29/1999

Small Feature Reproducibility
PI Name: Costas Spanos
E-mail: Spanos@eecs.Berkeley.edu
Campus: UCB, UCLA, UCD
Award Total: $3,626,088
Project Period: 6/30/1998 - 6/29/2000

Investigation of Thiogallate Particulate Screens of Cathodoluminescent Flat Panel Displays
PI Name: Joanna McKittrick
E-mail: jmckittrick@ucsd.edu
Campus: UCSD
Award Total: $37,950
Project Period: 6/30/1998 - 6/29/1999